Inventor

DORSH TOM

US3 patents

⚠️ This page may combine multiple inventors who share the name “DORSH TOM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NOVELLUS SYSTEMS INC

2 patents

US9230800B2Jan 5, 2016

Plasma activated conformal film deposition

NOVELLUS SYSTEMS INC41 citations93

US7037830B1May 2, 2006

PVD deposition process for enhanced properties of metal films

NOVELLUS SYSTEMS INC35 citations85

LAVOIE ADRIEN

1 patent

US8728956B2May 20, 2014

Plasma activated conformal film deposition

LAVOIE ADRIEN541 citations98