Inventor

KRISHNARAJ PADMANABAN

US2 patents

Patents

2 patents

US6450117B1Sep 17, 2002

Directing a flow of gas in a substrate processing chamber

APPLIED MATERIALS INC572 citations96

US6814814B2Nov 9, 2004

Cleaning residues from surfaces in a chamber by sputtering sacrificial substrates

APPLIED MATERIALS INC22 citations91