Inventor
PANG LILY L
US12 patents
⚠️ This page may combine multiple inventors who share the name “PANG LILY L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
11 patentsUS6450117B1Sep 17, 2002
Directing a flow of gas in a substrate processing chamber
APPLIED MATERIALS INC572 citations96
US7285195B2Oct 23, 2007
Electric field reducing thrust plate
APPLIED MATERIALS INC25 citations92
US7223323B2May 29, 2007
Multi-chemistry plating system
APPLIED MATERIALS INC44 citations92
US6517634B2Feb 11, 2003
Chemical vapor deposition chamber lid assembly
APPLIED MATERIALS INC36 citations92
US6363624B1Apr 2, 2002
Apparatus for cleaning a semiconductor process chamber
APPLIED MATERIALS INC20 citations92
US6364958B1Apr 2, 2002
Plasma assisted semiconductor substrate processing chamber having a plurality of ground path bridges
APPLIED MATERIALS INC43 citations92
US6958098B2Oct 25, 2005
Semiconductor wafer support lift-pin assembly
APPLIED MATERIALS INC18 citations91
US6572708B2Jun 3, 2003
Semiconductor wafer support lift-pin assembly
APPLIED MATERIALS INC27 citations91
US7520939B2Apr 21, 2009
Integrated bevel clean chamber
APPLIED MATERIALS INC12 citations84
US7691755B2Apr 6, 2010
Plasma immersion ion implantation with highly uniform chamber seasoning process for a toroidal source reactor
APPLIED MATERIALS INC4 citations63
US9303318B2Apr 5, 2016
Multiple complementary gas distribution assemblies
APPLIED MATERIALS INC0 citations40