Inventor

WACKMAN PETER H

US4 patents

Patents

4 patents

US4504964AMar 12, 1985

Laser beam plasma pinch X-ray system

EATON CORP145 citations97

US4633492ADec 30, 1986

Plasma pinch X-ray method

EATON CORP88 citations95

US4618971AOct 21, 1986

X-ray lithography system

EATON CORP89 citations95

US4536884AAug 20, 1985

Plasma pinch X-ray apparatus

EATON CORP99 citations95