Inventor
MORIMOTO TAMOTSU
JP17 patents
⚠️ This page may combine multiple inventors who share the name “MORIMOTO TAMOTSU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
11 patentsUS6514377B1Feb 4, 2003
Apparatus for and method of processing an object to be processed
TOKYO ELECTRON LTD98 citations97
US5567152AOct 22, 1996
Heat processing apparatus
TOKYO ELECTRON LTD31 citations92
US6322662B1Nov 27, 2001
Plasma treatment system
TOKYO ELECTRON LTD19 citations84
US12444606B2Oct 14, 2025
Methods for forming vertically layered ionic liquid crystal (ILC) structures on a semiconductor substrate
TOKYO ELECTRON LTD2 citations72
US12398324B1Aug 26, 2025
Methods for controlling the pitch of self-assembled ionic liquid crystal (ILC) structures
TOKYO ELECTRON LTD5 citations68
US10910229B2Feb 2, 2021
Substrate treatment method
TOKYO ELECTRON LTD0 citations60
US9911596B2Mar 6, 2018
Modification processing method and method of manufacturing semiconductor device
TOKYO ELECTRON LTD0 citations51
US9443724B2Sep 13, 2016
Modification processing method and method of manufacturing semiconductor device
TOKYO ELECTRON LTD0 citations51
US6793834B2Sep 21, 2004
Apparatus for and method of processing an object to be processed
TOKYO ELECTRON LTD0 citations51
US10790152B2Sep 29, 2020
Method for etching multilayer film
TOKYO ELECTRON LTD0 citations40
US9947864B2Apr 17, 2018
Method for etching object to be processed
TOKYO ELECTRON LTD0 citations39
ASAHI GLASS CO LTD
4 patentsUS7740946B2Jun 22, 2010
Electroconductive laminate, and electromagnetic wave shielding film for plasma display and protective plate for plasma display
ASAHI GLASS CO LTD9 citations82
US9025248B2May 5, 2015
Antireflection stack
ASAHI GLASS CO LTD2 citations57
US8040062B2Oct 18, 2011
Electroconductive laminate, and electromagnetic wave shielding film and protective plate for plasma display
ASAHI GLASS CO LTD3 citations57
US7771850B2Aug 10, 2010
Electromagnetic wave shielding laminate and display device employing it
ASAHI GLASS CO LTD1 citations50