Inventor
ZYWNO MAREK
US17 patents
⚠️ This page may combine multiple inventors who share the name “ZYWNO MAREK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
5 patentsUS7897942B1Mar 1, 2011
Dynamic tracking of wafer motion and distortion during lithography
KLA TENCOR CORP56 citations98
US6363166B1Mar 26, 2002
Automated photomask inspection apparatus
KLA TENCOR CORP94 citations97
US6052478AApr 18, 2000
Automated photomask inspection apparatus
KLA TENCOR CORP166 citations97
US6584218B2Jun 24, 2003
Automated photomask inspection apparatus
KLA TENCOR CORP8 citations72
US9141002B2Sep 22, 2015
Z-stage with dynamically driven stage mirror and chuck assembly having constraint
KLA TENCOR CORP0 citations47
(unassigned)
4 patentsUS5989444ANov 23, 1999
Fluid bearings and vacuum chucks and methods for producing same
13 citations81
US6698735B2Mar 2, 2004
Fluid bearings and vacuum chucks and methods for producing same
10 citations73
US6390677B1May 21, 2002
Fluid bearings and vacuum chucks and methods for producing same
4 citations73
US6516517B2Feb 11, 2003
Fluid bearings and vacuum chucks and methods for producing same
3 citations62