Inventor
SANCHEZ MARTHA INEZ
US3 patents
Patents
3 patentsUS7046342B2May 16, 2006
Apparatus for characterization of photoresist resolution, and method of use
IBM12 citations80
US7179571B2Feb 20, 2007
Apparatus for characterization of photoresist resolution, and method of use
IBM6 citations70
US10755928B2Aug 25, 2020
Fabricating electrically nonconductive blocks using a polymer brush and a sequential infiltration synthesis process
IBM0 citations40