Inventor
Pan ji-gang
CN3 patents
Patents
3 patentsUS9117695B1Aug 25, 2015
Method for fabricating semiconductor device
UNITED MICROELECTRONICS CORP11 citations79
US8901003B1Dec 2, 2014
Polishing method of semiconductor structure
UNITED MICROELECTRONICS CORP6 citations68
US9754788B2Sep 5, 2017
Manufacturing method of semiconductor structure including planarizing a polysilicon layer over an array area and a periphery area
UNITED MICROELECTRONICS CORP0 citations47