Inventor

SEGAWA MIKIO

JP2 patents

Patents

2 patents

US9704727B2Jul 11, 2017

Efem

SINFONIA TECHNOLOGY CO LTD10 citations82

US9412634B2Aug 9, 2016

Atmosphere replacement apparatus, substrate transport apparatus, substrate transport system, and EFEM

SINFONIA TECHNOLOGY CO LTD3 citations68