Inventor

KAWAHISA SHIN

JP2 patents

⚠️ This page may combine multiple inventors who share the name “KAWAHISA SHIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SINFONIA TECHNOLOGY CO LTD

1 patent

US9412634B2Aug 9, 2016

Atmosphere replacement apparatus, substrate transport apparatus, substrate transport system, and EFEM

SINFONIA TECHNOLOGY CO LTD3 citations68

NATSUME MITSUO

1 patent

US8821098B2Sep 2, 2014

Load port

NATSUME MITSUO6 citations68