P

Inventor

TAMURA NAOYUKI

JP63 patents
⚠️ This page may combine multiple inventors who share the name “TAMURA NAOYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI LTD

34 patents
US5685684ANov 11, 1997

Vacuum processing system

HITACHI LTD112 citations98
US5320982AJun 14, 1994

Wafer cooling method and apparatus

HITACHI LTD142 citations98
US6048434AApr 11, 2000

Substrate holding system including an electrostatic chuck

HITACHI LTD68 citations96
US5906684AMay 25, 1999

Method of holding substrate and substrate holding system

HITACHI LTD54 citations96
US5792304AAug 11, 1998

Method of holding substrate and substrate holding system

HITACHI LTD62 citations96
US5587205ADec 24, 1996

Plasma processing method and an apparatus for carrying out the same

HITACHI LTD59 citations96
US5556204ASep 17, 1996

Method and apparatus for detecting the temperature of a sample

HITACHI LTD92 citations96
US5536359AJul 16, 1996

Semiconductor device manufacturing apparatus and method with optical monitoring of state of processing chamber

HITACHI LTD86 citations96
US5458687AOct 17, 1995

Method of and apparatus for securing and cooling/heating a wafer

HITACHI LTD67 citations96
US5445484AAug 29, 1995

Vacuum processing system

HITACHI LTD67 citations96
US6664738B2Dec 16, 2003

Plasma processing apparatus

HITACHI LTD52 citations95
US5574247ANov 12, 1996

CVD reactor apparatus

HITACHI LTD608 citations95
US5673750AOct 7, 1997

Vacuum processing method and apparatus

HITACHI LTD37 citations93
US5663884ASep 2, 1997

Multiprocessing apparatus

HITACHI LTD19 citations93
US6645871B2Nov 11, 2003

Method of holding substrate and substrate holding system

HITACHI LTD20 citations92
US6524428B2Feb 25, 2003

Method of holding substrate and substrate holding system

HITACHI LTD24 citations92
US6336991B1Jan 8, 2002

Method of holding substrate and substrate holding system

HITACHI LTD19 citations92
US6221201B1Apr 24, 2001

Method of holding substrate and substrate holding system

HITACHI LTD18 citations92
US5985035ANov 16, 1999

Method of holding substrate and substrate holding system

HITACHI LTD17 citations92
US5961774AOct 5, 1999

Method of holding substrate and substrate holding system

HITACHI LTD22 citations92
US5580420ADec 3, 1996

Plasma generating method and apparatus and plasma processing method and apparatus

HITACHI LTD39 citations92
US5391260AFeb 21, 1995

Vacuum processing apparatus

HITACHI LTD24 citations92
US5259735ANov 9, 1993

Evacuation system and method therefor

HITACHI LTD45 citations92
US4810473AMar 7, 1989

Molecular beam epitaxy apparatus

HITACHI LTD24 citations92
US4542712ASep 24, 1985

Apparatus for molecular beam epitaxy

HITACHI LTD50 citations92
US6217705B1Apr 17, 2001

Method of holding substrate and substrate holding system

HITACHI LTD26 citations91
US6899789B2May 31, 2005

Method of holding substrate and substrate holding system

HITACHI LTD11 citations82
US6676805B2Jan 13, 2004

Method of holding substrate and substrate holding system

HITACHI LTD10 citations82
US5448470ASep 5, 1995

Multiprocessing apparatus

HITACHI LTD16 citations82
US4748315AMay 31, 1988

Molecular beam source

HITACHI LTD22 citations82
US4580522AApr 8, 1986

Rotary substrate holder of molecular beam epitaxy apparatus

HITACHI LTD20 citations82
US6610170B2Aug 26, 2003

Method of holding substrate and substrate holding system

HITACHI LTD8 citations74
US6610171B2Aug 26, 2003

Method of holding substrate and substrate holding system

HITACHI LTD6 citations74
US6544379B2Apr 8, 2003

Method of holding substrate and substrate holding system

HITACHI LTD9 citations74

MITSUI PETROCHEMICAL IND

4 patents

TOSHIBA KK

3 patents

HONDA MOTOR CO LTD

3 patents

TAMURA NAOYUKI

3 patents

HITACHI HIGH TECH CORP

2 patents

NISHIHATA KOUJI

1 patent

Showing the top 50 of 63 patents by PatentIndex Score.