Inventor
NEWMAN PETER C
US12 patents
Patents
12 patentsUS6128323AOct 3, 2000
Reliable modular production quality narrow-band high REP rate excimer laser
CYMER INC284 citations99
US5978394ANov 2, 1999
Wavelength system for an excimer laser
CYMER INC223 citations99
US6018537AJan 25, 2000
Reliable, modular, production quality narrow-band high rep rate F2 laser
CYMER INC280 citations98
US6757316B2Jun 29, 2004
Four KHz gas discharge laser
CYMER INC97 citations97
US6330261B1Dec 11, 2001
Reliable, modular, production quality narrow-band high rep rate ArF excimer laser
CYMER INC105 citations97
US6795474B2Sep 21, 2004
Gas discharge laser with improved beam path
CYMER INC46 citations92
USRE38054EApr 1, 2003
Reliable, modular, production quality narrow-band high rep rate F2 laser
CYMER INC42 citations92
US6539046B2Mar 25, 2003
Wavemeter for gas discharge laser
CYMER INC30 citations92
US6396582B1May 28, 2002
Wavelength reference for laser
CYMER INC10 citations73
US6301284B1Oct 9, 2001
Narrow band UV laser with visible light guide laser
CYMER INC8 citations73
US6504860B2Jan 7, 2003
Purge monitoring system for gas discharge laser
CYMER INC4 citations54
USRE41457EJul 27, 2010
Wavemeter for gas discharge laser
CYMER INC0 citations41