Inventor
DUFFEY THOMAS P
US15 patents
⚠️ This page may combine multiple inventors who share the name “DUFFEY THOMAS P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CYMER INC
12 patentsUS6128323AOct 3, 2000
Reliable modular production quality narrow-band high REP rate excimer laser
CYMER INC284 citations99
US6370174B1Apr 9, 2002
Injection seeded F2 lithography laser
CYMER INC99 citations98
US6240117B1May 29, 2001
Fluorine control system with fluorine monitor
CYMER INC205 citations98
US6018537AJan 25, 2000
Reliable, modular, production quality narrow-band high rep rate F2 laser
CYMER INC280 citations98
US6757316B2Jun 29, 2004
Four KHz gas discharge laser
CYMER INC97 citations97
US6330261B1Dec 11, 2001
Reliable, modular, production quality narrow-band high rep rate ArF excimer laser
CYMER INC105 citations97
US6034978AMar 7, 2000
Gas discharge laser with gas temperature control
CYMER INC70 citations95
USRE38054EApr 1, 2003
Reliable, modular, production quality narrow-band high rep rate F2 laser
CYMER INC42 citations92
US6330260B1Dec 11, 2001
F2 laser with visible red and IR control
CYMER INC12 citations74
US7535948B2May 19, 2009
Cathodes for fluorine gas discharge lasers
CYMER INC7 citations72
US7301980B2Nov 27, 2007
Halogen gas discharge laser electrodes
CYMER INC5 citations61
US7995637B2Aug 9, 2011
Gas discharge laser chamber
CYMER INC1 citations48
Cymer LLC
3 patentsUS9599510B2Mar 21, 2017
Estimation of spectral feature of pulsed light beam
Cymer LLC6 citations72
US10096967B2Oct 9, 2018
Wavelength control system for pulse-by-pulse wavelength target tracking in DUV light source
Cymer LLC0 citations51
US9246298B2Jan 26, 2016
Corrosion resistant electrodes for laser chambers
Cymer LLC1 citations51