Inventor
MELCHER PAUL C
US15 patents
⚠️ This page may combine multiple inventors who share the name “MELCHER PAUL C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CYMER INC
14 patentsUS6690704B2Feb 10, 2004
Control system for a two chamber gas discharge laser
CYMER INC128 citations98
US5936988AAug 10, 1999
High pulse rate pulse power system
CYMER INC154 citations98
US6757316B2Jun 29, 2004
Four KHz gas discharge laser
CYMER INC97 citations97
US6151346ANov 21, 2000
High pulse rate pulse power system with fast rise time and low current
CYMER INC89 citations97
US7079564B2Jul 18, 2006
Control system for a two chamber gas discharge laser
CYMER INC26 citations92
US7039086B2May 2, 2006
Control system for a two chamber gas discharge laser
CYMER INC32 citations92
US6914919B2Jul 5, 2005
Six to ten KHz, or greater gas discharge laser system
CYMER INC34 citations92
US6240112B1May 29, 2001
High pulse rate pulse power system with liquid cooling
CYMER INC32 citations92
US6028872AFeb 22, 2000
High pulse rate pulse power system with resonant power supply
CYMER INC53 citations92
US7002443B2Feb 21, 2006
Method and apparatus for cooling magnetic circuit elements
CYMER INC35 citations90
US6882674B2Apr 19, 2005
Four KHz gas discharge laser system
CYMER INC31 citations90
USRE42588EAug 2, 2011
Control system for a two chamber gas discharge laser system
CYMER INC5 citations62
US7596164B2Sep 29, 2009
Control system for a two chamber gas discharge laser
CYMER INC5 citations62
US7101203B2Sep 5, 2006
Method and apparatus for electronically interconnecting high voltage modules positioned in relatively close proximity
CYMER INC5 citations59