Inventor
GROSS VAUGHN P
US4 patents
Patents
4 patentsUS5116583AMay 26, 1992
Suppression of particle generation in a modified clean room corona air ionizer
IBM47 citations91
US5316970AMay 31, 1994
Generation of ionized air for semiconductor chips
IBM21 citations90
US6180291B1Jan 30, 2001
Static resistant reticle
IBM28 citations88
US5432670AJul 11, 1995
Generation of ionized air for semiconductor chips
IBM8 citations71