Inventor
SAETHRE ROBERT B
US5 patents
⚠️ This page may combine multiple inventors who share the name “SAETHRE ROBERT B”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CYMER INC
4 patentsUS6757316B2Jun 29, 2004
Four KHz gas discharge laser
CYMER INC97 citations97
US7002443B2Feb 21, 2006
Method and apparatus for cooling magnetic circuit elements
CYMER INC35 citations90
US6882674B2Apr 19, 2005
Four KHz gas discharge laser system
CYMER INC31 citations90
US7101203B2Sep 5, 2006
Method and apparatus for electronically interconnecting high voltage modules positioned in relatively close proximity
CYMER INC5 citations59