P

Inventor

FLEUROV VLADIMIR B

US12 patents
⚠️ This page may combine multiple inventors who share the name “FLEUROV VLADIMIR B”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CYMER INC

5 patents
US6757316B2Jun 29, 2004

Four KHz gas discharge laser

CYMER INC97 citations97
US6317447B1Nov 13, 2001

Electric discharge laser with acoustic chirp correction

CYMER INC108 citations97
US6466602B1Oct 15, 2002

Gas discharge laser long life electrodes

CYMER INC69 citations94
US6553049B1Apr 22, 2003

ArF laser with low pulse energy and high rep rate

CYMER INC22 citations92
US7643528B2Jan 5, 2010

Immersion lithography laser light source with pulse stretcher

CYMER INC6 citations57

ASML NETHERLANDS BV

2 patents
US9000405B2Apr 7, 2015

Beam position control for an extreme ultraviolet light source

ASML NETHERLANDS BV9 citations84
US9167679B2Oct 20, 2015

Beam position control for an extreme ultraviolet light source

ASML NETHERLANDS BV0 citations52

Cymer LLC

2 patents
US9271381B2Feb 23, 2016

Methods and apparatus for laser produced plasma EUV light source

Cymer LLC6 citations72
US9000404B2Apr 7, 2015

Systems and methods for optics cleaning in an EUV light source

Cymer LLC1 citations52

BYKANOV ALEXANDER N

1 patent
US8633459B2Jan 21, 2014

Systems and methods for optics cleaning in an EUV light source

BYKANOV ALEXANDER N11 citations83

FLEUROV VLADIMIR B

1 patent
US9516730B2Dec 6, 2016

Systems and methods for buffer gas flow stabilization in a laser produced plasma light source

FLEUROV VLADIMIR B3 citations67

UJAZDOWSKI RICHARD C

1 patent
US8855166B2Oct 7, 2014

6 KHz and above gas discharge laser system

UJAZDOWSKI RICHARD C3 citations55