Inventor

KAWAGUCHI SAKAE

JP2 patents

Patents

2 patents

US5470621ANov 28, 1995

Frame-supported pellicle for dustproof protection of photomask

SHINETSU CHEMICAL CO34 citations91

US5419972AMay 30, 1995

Frame-supported pellicle for dustproof protection of photomask

SHINETSU CHEMICAL CO15 citations72