Inventor
RETTIG CURTIS L
US8 patents
Patents
8 patentsUS6972421B2Dec 6, 2005
Extreme ultraviolet light source
CYMER INC141 citations97
US6757316B2Jun 29, 2004
Four KHz gas discharge laser
CYMER INC97 citations97
US7368741B2May 6, 2008
Extreme ultraviolet light source
CYMER INC65 citations96
US6914919B2Jul 5, 2005
Six to ten KHz, or greater gas discharge laser system
CYMER INC34 citations92
US6882674B2Apr 19, 2005
Four KHz gas discharge laser system
CYMER INC31 citations90
US7217941B2May 15, 2007
Systems and methods for deflecting plasma-generated ions to prevent the ions from reaching an internal component of an EUV light source
CYMER INC35 citations88
US7522650B2Apr 21, 2009
Gas discharge laser chamber improvements
CYMER INC8 citations82
US6765946B2Jul 20, 2004
Fan for gas discharge laser
CYMER INC5 citations62