Inventor
SHANNON ROBERT A
US13 patents
⚠️ This page may combine multiple inventors who share the name “SHANNON ROBERT A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CYMER INC
8 patentsUS6757316B2Jun 29, 2004
Four KHz gas discharge laser
CYMER INC97 citations97
US6034978AMar 7, 2000
Gas discharge laser with gas temperature control
CYMER INC70 citations95
US6466602B1Oct 15, 2002
Gas discharge laser long life electrodes
CYMER INC69 citations94
US6914919B2Jul 5, 2005
Six to ten KHz, or greater gas discharge laser system
CYMER INC34 citations92
US6882674B2Apr 19, 2005
Four KHz gas discharge laser system
CYMER INC31 citations90
US6034984AMar 7, 2000
Tangential fan with cutoff assembly and vibration control for electric discharge laser
CYMER INC17 citations84
US6023486AFeb 8, 2000
Soldered fan assembly for electric discharge laser
CYMER INC13 citations73
US6144686ANov 7, 2000
Tangential fan with cutoff assembly and vibration control for electric discharge laser
CYMER INC6 citations63
NORTH AMERICAN MFG
3 patentsUS5813846ASep 29, 1998
Low NOx flat flame burner
NORTH AMERICAN MFG77 citations93
US6113386ASep 5, 2000
Method and apparatus for uniformly heating a furnace
NORTH AMERICAN MFG23 citations84
US4577278AMar 18, 1986
Method and system for controlling a selected zone in a fuel fired furnace
NORTH AMERICAN MFG17 citations73