Inventor
ALGOTS JOHN M
US14 patents
⚠️ This page may combine multiple inventors who share the name “ALGOTS JOHN M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CYMER INC
13 patentsUS6853653B2Feb 8, 2005
Laser spectral engineering for lithographic process
CYMER INC74 citations97
US6757316B2Jun 29, 2004
Four KHz gas discharge laser
CYMER INC97 citations97
US6721340B1Apr 13, 2004
Bandwidth control technique for a laser
CYMER INC114 citations97
US6671294B2Dec 30, 2003
Laser spectral engineering for lithographic process
CYMER INC114 citations97
US6532247B2Mar 11, 2003
Laser wavelength control unit with piezoelectric driver
CYMER INC79 citations97
US6529531B1Mar 4, 2003
Fast wavelength correction technique for a laser
CYMER INC86 citations97
US6192064B1Feb 20, 2001
Narrow band laser with fine wavelength control
CYMER INC258 citations97
US7382815B2Jun 3, 2008
Laser spectral engineering for lithographic process
CYMER INC14 citations92
US6882674B2Apr 19, 2005
Four KHz gas discharge laser system
CYMER INC31 citations90
US6496528B2Dec 17, 2002
Line narrowing unit with flexural grating mount
CYMER INC31 citations88
US6650666B2Nov 18, 2003
Laser wavelength control unit with piezoelectric driver
CYMER INC19 citations83
US7139301B2Nov 21, 2006
Laser spectral engineering for lithographic process
CYMER INC9 citations73
US7298770B2Nov 20, 2007
Laser spectral engineering for lithographic process
CYMER INC4 citations62