Inventor
SPANGLER RONALD L
US8 patents
Patents
8 patentsUS6853653B2Feb 8, 2005
Laser spectral engineering for lithographic process
CYMER INC74 citations97
US6757316B2Jun 29, 2004
Four KHz gas discharge laser
CYMER INC97 citations97
US6532247B2Mar 11, 2003
Laser wavelength control unit with piezoelectric driver
CYMER INC79 citations97
US7382815B2Jun 3, 2008
Laser spectral engineering for lithographic process
CYMER INC14 citations92
US6704339B2Mar 9, 2004
Lithography laser with beam delivery and beam pointing control
CYMER INC50 citations91
US6882674B2Apr 19, 2005
Four KHz gas discharge laser system
CYMER INC31 citations90
US6650666B2Nov 18, 2003
Laser wavelength control unit with piezoelectric driver
CYMER INC19 citations83
US7298770B2Nov 20, 2007
Laser spectral engineering for lithographic process
CYMER INC4 citations62