Inventor

MAI JOACHIM

DE7 patents

⚠️ This page may combine multiple inventors who share the name “MAI JOACHIM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MAI JOACHIM

2 patents

US9224581B2Dec 29, 2015

Parallel plate reactor for uniform thin film deposition with reduced tool foot-print

MAI JOACHIM12 citations75

US8790498B2Jul 29, 2014

Method and device for ion beam processing of surfaces

MAI JOACHIM0 citations32

MEYER BURGER GERMANY GMBH

2 patents

US10685813B2Jun 16, 2020

Plasma treatment device with two microwave plasma sources coupled to one another, and method for operating a plasma treatment device of this kind

MEYER BURGER GERMANY GMBH3 citations69

US10199250B2Feb 5, 2019

Substrate processing device

MEYER BURGER GERMANY GMBH0 citations32

MEYER BURGER (GERMANY) AG

1 patent

US9431217B2Aug 30, 2016

Microwave plasma generating device and method for operating same

MEYER BURGER (GERMANY) AG11 citations74

MEYER BURGER GERMANY AG

1 patent

US9984857B2May 29, 2018

Plasma generation device

MEYER BURGER GERMANY AG3 citations67

ROTH & RAU AG

1 patent

US9556517B2Jan 31, 2017

Gas separation

ROTH & RAU AG0 citations23