Inventor
SHEN XIAOMENG
US3 patents
Patents
3 patentsUS11829077B2Nov 28, 2023
System and method for determining post bonding overlay
KLA CORP3 citations70
US12197137B2Jan 14, 2025
System and method for determining post bonding overlay
KLA CORP1 citations61
US11049720B2Jun 29, 2021
Removable opaque coating for accurate optical topography measurements on top surfaces of transparent films
KLA CORP0 citations58