Inventor
PHAM THANH N
US13 patents
Patents
13 patentsUS7399388B2Jul 15, 2008
Sequential gas flow oxide deposition technique
APPLIED MATERIALS INC622 citations99
US6903031B2Jun 7, 2005
In-situ-etch-assisted HDP deposition using SiF4 and hydrogen
APPLIED MATERIALS INC111 citations99
US7081414B2Jul 25, 2006
Deposition-selective etch-deposition process for dielectric film gapfill
APPLIED MATERIALS INC98 citations98
US7097886B2Aug 29, 2006
Deposition process for high aspect ratio trenches
APPLIED MATERIALS INC56 citations96
US7479304B2Jan 20, 2009
Gas distribution plate fabricated from a solid yttrium oxide-comprising substrate
APPLIED MATERIALS INC42 citations95
US7033945B2Apr 25, 2006
Gap filling with a composite layer
APPLIED MATERIALS INC43 citations92
US6511923B1Jan 28, 2003
Deposition of stable dielectric films
APPLIED MATERIALS INC42 citations92
US7141138B2Nov 28, 2006
Gas delivery system for semiconductor processing
APPLIED MATERIALS INC13 citations83
US7294588B2Nov 13, 2007
In-situ-etch-assisted HDP deposition
APPLIED MATERIALS INC5 citations74
US7049211B2May 23, 2006
In-situ-etch-assisted HDP deposition using SiF4
APPLIED MATERIALS INC6 citations74
US7799698B2Sep 21, 2010
Deposition-selective etch-deposition process for dielectric film gapfill
APPLIED MATERIALS INC4 citations63
US7691753B2Apr 6, 2010
Deposition-selective etch-deposition process for dielectric film gapfill
APPLIED MATERIALS INC3 citations63
US7498268B2Mar 3, 2009
Gas delivery system for semiconductor processing
APPLIED MATERIALS INC1 citations51