Inventor
ZHU HELEN
US10 patents
⚠️ This page may combine multiple inventors who share the name “ZHU HELEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
9 patentsUS5611888AMar 18, 1997
Plasma etching of semiconductors
LAM RES CORP70 citations92
US7129171B2Oct 31, 2006
Selective oxygen-free etching process for barrier materials
LAM RES CORP21 citations91
US6297163B1Oct 2, 2001
Method of plasma etching dielectric materials
LAM RES CORP37 citations86
US7772122B2Aug 10, 2010
Sidewall forming processes
LAM RES CORP11 citations83
US9558928B2Jan 31, 2017
Contact clean in high-aspect ratio structures
LAM RES CORP7 citations81
US7288488B2Oct 30, 2007
Method for resist strip in presence of regular low k and/or porous low k dielectric materials
LAM RES CORP3 citations62
US7202177B2Apr 10, 2007
Nitrous oxide stripping process for organosilicate glass
LAM RES CORP2 citations61
US6916697B2Jul 12, 2005
Etch back process using nitrous oxide
LAM RES CORP6 citations61
US6949469B1Sep 27, 2005
Methods and apparatus for the optimization of photo resist etching in a plasma processing system
LAM RES CORP1 citations46