Inventor
ANNAPRAGADA RAO
US11 patents
⚠️ This page may combine multiple inventors who share the name “ANNAPRAGADA RAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
9 patentsUS6413877B1Jul 2, 2002
Method of preventing damage to organo-silicate-glass materials during resist stripping
LAM RES CORP132 citations97
US6630407B2Oct 7, 2003
Plasma etching of organic antireflective coating
LAM RES CORP58 citations93
US6518174B2Feb 11, 2003
Combined resist strip and barrier etch process for dual damascene structures
LAM RES CORP23 citations92
US7129171B2Oct 31, 2006
Selective oxygen-free etching process for barrier materials
LAM RES CORP21 citations91
US7323116B2Jan 29, 2008
Methods and apparatus for monitoring a process in a plasma processing system by measuring self-bias voltage
LAM RES CORP29 citations86
US7081407B2Jul 25, 2006
Method of preventing damage to porous low-k materials during resist stripping
LAM RES CORP11 citations83
US6828250B1Dec 7, 2004
Process for etching vias in organosilicate glass materials without causing RIE lag
LAM RES CORP10 citations71
US7202177B2Apr 10, 2007
Nitrous oxide stripping process for organosilicate glass
LAM RES CORP2 citations61
US6916697B2Jul 12, 2005
Etch back process using nitrous oxide
LAM RES CORP6 citations61