Inventor
CHUNG CHING THIAM
SG3 patents
Patents
3 patentsUS6713335B2Mar 30, 2004
Method of self-aligning a damascene gate structure to isolation regions
CHARTERED SEMICONDUCTOR MFG11 citations66
US6743694B2Jun 1, 2004
Method of wafer marking for multi-layer metal processes
CHARTERED SEMICONDUCTOR MFG10 citations63
US7376920B2May 20, 2008
Method to monitor critical dimension of IC interconnect
CHARTERED SEMICONDUCTOR MFG1 citations48