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Inventor
ISOBE MITSUHARU
JP
2 patents
Patents
2 patents
US7866029B2
Jan 11, 2011
Method for forming a pattern film with a narrower width
TDK CORP
1 citations
43
US7569332B2
Aug 4, 2009
Processing method of thin-film and manufacturing method of thin-film magnetic head
TDK CORP
0 citations
31