P

Inventor

TANIMOTO KENJI

JP67 patents
⚠️ This page may combine multiple inventors who share the name “TANIMOTO KENJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI HIGH TECH CORP

16 patents
US7683319B2Mar 23, 2010

Charge control apparatus and measurement apparatus equipped with the charge control apparatus

HITACHI HIGH TECH CORP36 citations92
US7728294B2Jun 1, 2010

Semiconductor wafer inspection tool and semiconductor wafer inspection method

HITACHI HIGH TECH CORP18 citations84
US7241996B2Jul 10, 2007

Charged particle beam apparatus

HITACHI HIGH TECH CORP8 citations74
US12068128B2Aug 20, 2024

Charged particle beam system

HITACHI HIGH TECH CORP2 citations73
US10903037B2Jan 26, 2021

Charged particle beam device

HITACHI HIGH TECH CORP2 citations72
US11353798B2Jun 7, 2022

Pattern measurement device and pattern measurement method

HITACHI HIGH TECH CORP2 citations71
US11251018B2Feb 15, 2022

Scanning electron microscope

HITACHI HIGH TECH CORP3 citations71
US10816332B2Oct 27, 2020

Pattern measurement device and pattern measurement method

HITACHI HIGH TECH CORP3 citations71
US7435960B2Oct 14, 2008

Charged particle beam apparatus

HITACHI HIGH TECH CORP2 citations63
US12586748B2Mar 24, 2026

Structure for particle acceleration and charged particle beam apparatus

HITACHI HIGH TECH CORP0 citations62
US12469665B2Nov 11, 2025

Charged particle beam device

HITACHI HIGH TECH CORP0 citations62
US12394586B2Aug 19, 2025

Charged particle beam device

HITACHI HIGH TECH CORP0 citations62
US10170273B2Jan 1, 2019

Charged particle beam device, and method of manufacturing component for charged particle beam device

HITACHI HIGH TECH CORP1 citations62
US9224575B2Dec 29, 2015

Charged particle beam device and overlay misalignment measurement method

HITACHI HIGH TECH CORP3 citations62
US12174551B2Dec 24, 2024

Pattern measurement device and pattern measurement method

HITACHI HIGH TECH CORP0 citations61
US11276554B2Mar 15, 2022

Scanning electron microscope and method for measuring pattern

HITACHI HIGH TECH CORP1 citations61

DAIKIN IND LTD

11 patents

NISSAN CHEMICAL IND LTD

10 patents

SUMITOMO CHEMICAL CO

6 patents

HITACHI LTD

3 patents

FUJI XEROX CO LTD

2 patents

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD

1 patent

SUZUKI MAKOTO

1 patent

Showing the top 50 of 67 patents by PatentIndex Score.