Inventor
ROBERTSON LANCE S
US12 patents
Patents
12 patentsUS7422967B2Sep 9, 2008
Method for manufacturing a semiconductor device containing metal silicide regions
TEXAS INSTRUMENTS INC15 citations82
US7029967B2Apr 18, 2006
Silicide method for CMOS integrated circuits
TEXAS INSTRUMENTS INC7 citations73
US6699771B1Mar 2, 2004
Process for optimizing junctions formed by solid phase epitaxy
TEXAS INSTRUMENTS INC12 citations72
US7232744B2Jun 19, 2007
Method for implanting dopants within a substrate by tilting the substrate relative to the implant source
TEXAS INSTRUMENTS INC7 citations70
US7335595B2Feb 26, 2008
Silicide formation using a low temperature anneal process
TEXAS INSTRUMENTS INC3 citations61
US7208409B2Apr 24, 2007
Integrated circuit metal silicide method
TEXAS INSTRUMENTS INC6 citations60
US7466009B2Dec 16, 2008
Method for reducing dislocation threading using a suppression implant
TEXAS INSTRUMENTS INC3 citations59
US7033879B2Apr 25, 2006
Semiconductor device having optimized shallow junction geometries and method for fabrication thereof
TEXAS INSTRUMENTS INC6 citations58
US7253072B2Aug 7, 2007
Implant optimization scheme
TEXAS INSTRUMENTS INC3 citations56
US7638415B2Dec 29, 2009
Method for reducing dislocation threading using a suppression implant
TEXAS INSTRUMENTS INC0 citations49
US7807978B2Oct 5, 2010
Divergent charged particle implantation for improved transistor symmetry
TEXAS INSTRUMENTS INC0 citations48
US7385202B2Jun 10, 2008
Divergent charged particle implantation for improved transistor symmetry
TEXAS INSTRUMENTS INC0 citations48