Inventor

DIRKMAAT MARCO

NL2 patents

Patents

2 patents

US10249524B2Apr 2, 2019

Cassette holder assembly for a substrate cassette and holding member for use in such assembly

ASM IP HOLDING BV418 citations94

US10672636B2Jun 2, 2020

Cassette holder assembly for a substrate cassette and holding member for use in such assembly

ASM IP HOLDING BV0 citations48