Inventor
CARDOSO ANDRE G
US3 patents
Patents
3 patentsUS6259072B1Jul 10, 2001
Zone controlled radiant heating system utilizing focused reflector
AXCELIS TECH INC58 citations93
US6585908B2Jul 1, 2003
Shallow angle interference process and apparatus for determining real-time etching rate
AXCELIS TECH INC17 citations81
US6547458B1Apr 15, 2003
Optimized optical system design for endpoint detection
AXCELIS TECH INC16 citations81