Inventor

SAKURAGI ISAMU

JP3 patents

⚠️ This page may combine multiple inventors who share the name “SAKURAGI ISAMU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SAKURAGI ISAMU

1 patent

US8821644B2Sep 2, 2014

Bevel/backside polymer removing method and device, substrate processing apparatus and storage medium

SAKURAGI ISAMU12 citations78

TOKYO ELECTRON LTD

1 patent

US8021564B2Sep 20, 2011

Method for detecting an end point of resist peeling, method and apparatus for peeling resist, and computer-readable storage medium

TOKYO ELECTRON LTD4 citations59

TOMIOKA KAZUHIRO

1 patent

US8187981B2May 29, 2012

Substrate processing method, substrate processing system, and computer-readable storage medium

TOMIOKA KAZUHIRO1 citations49