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Inventor
LANI SEBASTIAN
CH
3 patents
Patents
3 patents
US9791691B2
Oct 17, 2017
Mirror array
ZEISS CARL SMT GMBH
2 citations
68
US9804501B2
Oct 31, 2017
Optical component
ZEISS CARL SMT GMBH
1 citations
46
US10078271B2
Sep 18, 2018
Optical component
ZEISS CARL SMT GMBH
0 citations
36