Inventor
GAFF KEITH
US28 patents
⚠️ This page may combine multiple inventors who share the name “GAFF KEITH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
26 patentsUS8884194B2Nov 11, 2014
Heating plate with planar heater zones for semiconductor processing
LAM RES CORP52 citations98
US7497614B2Mar 3, 2009
Apparatus for determining a temperature of a substrate and methods therefor
LAM RES CORP468 citations98
US9101038B2Aug 4, 2015
Electrostatic chuck including declamping electrode and method of declamping
LAM RES CORP60 citations95
US9392643B2Jul 12, 2016
Heating plate with planar heater zones for semiconductor processing
LAM RES CORP12 citations92
US7560007B2Jul 14, 2009
In-situ wafer temperature measurement and control
LAM RES CORP22 citations92
US10720346B2Jul 21, 2020
Substrate support with thermal zones for semiconductor processing
LAM RES CORP5 citations84
US10236193B2Mar 19, 2019
Substrate supports with multi-layer structure including independent operated heater zones
LAM RES CORP6 citations84
US9922857B1Mar 20, 2018
Electrostatically clamped edge ring
LAM RES CORP13 citations84
US9646861B2May 9, 2017
Heating plate with heating zones for substrate processing and method of use thereof
LAM RES CORP7 citations84
US10804081B2Oct 13, 2020
Edge ring dimensioned to extend lifetime of elastomer seal in a plasma processing chamber
LAM RES CORP7 citations82
US8852964B2Oct 7, 2014
Controlling CD and CD uniformity with trim time and temperature on a wafer by wafer basis
LAM RES CORP14 citations82
US11848177B2Dec 19, 2023
Multi-plate electrostatic chucks with ceramic baseplates
LAM RES CORP4 citations74
US11651991B2May 16, 2023
Electrostatic Chuck design for cooling-gas light-up prevention
LAM RES CORP2 citations73
US11069553B2Jul 20, 2021
Electrostatic chuck with features for preventing electrical arcing and light-up and improving process uniformity
LAM RES CORP2 citations73
US11024532B2Jun 1, 2021
Electrostatic chuck design for cooling-gas light-up prevention
LAM RES CORP1 citations73
US10923380B2Feb 16, 2021
Electrostatically clamped edge ring
LAM RES CORP2 citations73
US10083853B2Sep 25, 2018
Electrostatic chuck design for cooling-gas light-up prevention
LAM RES CORP2 citations73
US7578616B2Aug 25, 2009
Apparatus for determining a temperature of a substrate and methods therefor
LAM RES CORP7 citations73
US11967517B2Apr 23, 2024
Electrostatic chuck with ceramic monolithic body
LAM RES CORP2 citations72
US9012243B2Apr 21, 2015
Controlling CD and CD uniformity with trim time and temperature on a wafer by wafer basis
LAM RES CORP4 citations71
US10002782B2Jun 19, 2018
ESC assembly including an electrically conductive gasket for uniform RF power delivery therethrough
LAM RES CORP3 citations69
US12451335B2Oct 21, 2025
Multi-plate electrostatic chucks with ceramic baseplates
LAM RES CORP0 citations62
US11935776B2Mar 19, 2024
Electrostatically clamped edge ring
LAM RES CORP0 citations62
US10804129B2Oct 13, 2020
Electrostatic chuck assembly incorporation a gasket for distributing RF power to a ceramic embedded electrode
LAM RES CORP0 citations52
US10872748B2Dec 22, 2020
Systems and methods for correcting non-uniformities in plasma processing of substrates
LAM RES CORP0 citations51
US12227840B2Feb 18, 2025
Substrate support with varying depths of areas between mesas and corresponding temperature dependent method of fabricating
LAM RES CORP0 citations43