Inventor

HILL HENRY ALLEN

US43 patents

⚠️ This page may combine multiple inventors who share the name “HILL HENRY ALLEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HILL HENRY ALLEN

ZETETIC INST

Scanning interferometric near-field confocal microscopy

Optical storage system based on scanning interferometric near-field confocal microscopy

Optical storage system based on scanning interferometric near-field confocal microscopy

Apparatus and methods for overlay, alignment mark, and critical dimension metrologies based on optical interferometry

Catoptric and catadioptric imaging systems with adaptive catoptric surfaces

Interferometric confocal microscopy incorporating a pinhole array beam-splitter

Apparatus and method for joint and time delayed measurements of components of conjugated quadratures of fields of reflected/scattered and transmitted/scattered beams by an object in interferometry

Apparatus and method for joint measurement of fields of scattered/reflected or transmitted orthogonally polarized beams by an object in interferometry

Method and apparatus for dark field interferometric confocal microscopy

Apparatus and method for measurement of critical dimensions of features and detection of defects in UV, VUV, and EUV lithography masks

Apparatus and method for ellipsometric measurements with high spatial resolution

Sub-nanometer overlay, critical dimension, and lithography tool projection optic metrology systems based on measurement of exposure induced changes in photoresist on wafers

Method and apparatus for enhanced resolution of high spatial frequency components of images using standing wave beams in non-interferometric and interferometric microscopy

Catoptric imaging systems comprising pellicle and/or aperture-array beam-splitters and non-adaptive and/or adaptive catoptric surfaces

Longitudinal differential interferometric confocal microscopy

Apparatus and method for high speed scan for detection and measurement of properties of sub-wavelength defects and artifacts in semiconductor and mask metrology

Method for constructing a catadioptric lens system

Transverse differential interferometric confocal microscopy

Leaky guided wave modes used in interferometric confocal microscopy to measure properties of trenches

Multiple-source arrays fed by guided-wave structures and resonant guided-wave structure cavities

Apparatus and method for measurement of fields of backscattered and forward scattered/reflected beams by an object in interferometry

Compensation for effects of mismatch in indices of refraction at a substrate-medium interface in non-confocal, confocal, and interferometric confocal microscopy

ZYGO CORP

Gas insensitive interferometric apparatus and methods

Apparatus and method for measuring the refractive index and optical path length effects of air using multiple-pass interferometry

Interferometers utilizing polarization preserving optical systems

Apparatus and methods for measuring intrinsic optical properties of a gas

Apparatus to transform with high efficiency a single frequency, linearly polarized laser beam into beams with two orthogonally polarized frequency components orthogonally polarized

Tilted interferometer

Apparatus and method for measuring mirrors in situ

Interferometric apparatus for measuring the topography of mirrors in situ and providing error correction signals therefor

Interferometric apparatus for precision measurement of altitude to a surface

Dynamic angle measuring interferometer

Apparatus and method for interferometric measurements of angular orientation and distance to a plane mirror object

Polarization preserving optical systems

Apparatus for generating linearly-orthogonally polarized light beams

Apparatus for efficiently transforming a single frequency, linearly polarized laser beam into principally two orthogonally polarized beams having different frequencies

Apparatus for generating orthogonally polarized beams having different frequencies

Interferometers for measuring changes in optical beam direction

Superheterodyne method and apparatus for measuring the refractive index of air using multiple-pass interferometry

Method and apparatus for stage mirror mapping

Interferometric apparatus and method with phase shift compensation

Interferometer system and litographic step-and-scan apparatus provided with such a system

Optical beam shearing apparatus