Inventor

STICE JAMES CLAYTON

US2 patents

Patents

2 patents

US6630360B2Oct 7, 2003

Advanced process control (APC) of copper thickness for chemical mechanical planarization (CMP) optimization

ADVANCED MICRO DEVICES INC36 citations87

US6332973B1Dec 25, 2001

CMOS chemical bath purification

ADVANCED MICRO DEVICES INC2 citations54