Inventor
TEMPLE KAREN
US6 patents
Patents
6 patentsUS7326442B2Feb 5, 2008
Antireflective composition and process of making a lithographic structure
IBM11 citations84
US7172849B2Feb 6, 2007
Antireflective hardmask and uses thereof
IBM10 citations83
US7648820B2Jan 19, 2010
Antireflective hardmask and uses thereof
IBM7 citations73
US7816068B2Oct 19, 2010
Underlayer compositions containing heterocyclic aromatic structures
IBM2 citations61
US7807332B2Oct 5, 2010
Underlayer compositions containing heterocyclic aromatic structures
IBM3 citations61
US7375172B2May 20, 2008
Underlayer compositions containing heterocyclic aromatic structures
IBM2 citations61