Inventor
BOWES MICHAEL
US4 patents
Patents
4 patentsUS12261081B2Mar 25, 2025
Tungsten feature fill with inhibition control
LAM RES CORP2 citations73
US10977405B2Apr 13, 2021
Fill process optimization using feature scale modeling
LAM RES CORP3 citations70
US12476143B2Nov 18, 2025
Backside reactive inhibition gas
LAM RES CORP0 citations61
US12002679B2Jun 4, 2024
High step coverage tungsten deposition
LAM RES CORP1 citations61