Inventor
TRAN JOE G
US10 patents
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TEXAS INSTRUMENTS INC
9 patentsUS7943499B2May 17, 2011
FUSI integration method using SOG as a sacrificial planarization layer
TEXAS INSTRUMENTS INC1 citations62
US7396716B2Jul 8, 2008
Method to obtain fully silicided poly gate
TEXAS INSTRUMENTS INC4 citations62
US7727842B2Jun 1, 2010
Method of simultaneously siliciding a polysilicon gate and source/drain of a semiconductor device, and related device
TEXAS INSTRUMENTS INC2 citations61
US6686283B1Feb 3, 2004
Shallow trench isolation planarization using self aligned isotropic etch
TEXAS INSTRUMENTS INC4 citations57
US7732312B2Jun 8, 2010
FUSI integration method using SOG as a sacrificial planarization layer
TEXAS INSTRUMENTS INC0 citations51
US7732313B2Jun 8, 2010
FUSI integration method using SOG as a sacrificial planarization layer
TEXAS INSTRUMENTS INC0 citations51
US7498264B2Mar 3, 2009
Method to obtain fully silicided poly gate
TEXAS INSTRUMENTS INC6 citations51
US7998865B2Aug 16, 2011
Systems and methods for removing wafer edge residue and debris using a residue remover mechanism
TEXAS INSTRUMENTS INC0 citations50
US7186651B2Mar 6, 2007
Chemical mechanical polishing method and apparatus
TEXAS INSTRUMENTS INC0 citations34