P

Inventor

MITSUI TADASHI

JP44 patents
⚠️ This page may combine multiple inventors who share the name “MITSUI TADASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOSHIBA KK

18 patents
US5702567ADec 30, 1997

Plurality of photolithographic alignment marks with shape, size and spacing based on circuit pattern features

TOSHIBA KK56 citations96
US5611942AMar 18, 1997

Method for producing tips for atomic force microscopes

TOSHIBA KK47 citations93
US5491339AFeb 13, 1996

Charged particle detection device and charged particle radiation apparatus

TOSHIBA KK29 citations93
US6278114B1Aug 21, 2001

Method and apparatus for measuring dimensions of a feature of a specimen

TOSHIBA KK26 citations92
US5917205AJun 29, 1999

Photolithographic alignment marks based on circuit pattern feature

TOSHIBA KK39 citations87
US7668373B2Feb 23, 2010

Pattern evaluation method, method of manufacturing semiconductor, program and pattern evaluation apparatus

TOSHIBA KK15 citations84
US6985626B2Jan 10, 2006

Pattern evaluation method, pattern evaluation system and computer-readable recorded medium

TOSHIBA KK12 citations84
US7702157B2Apr 20, 2010

Pattern evaluation method, pattern matching method and computer readable medium

TOSHIBA KK6 citations74
US7526408B2Apr 28, 2009

Measurement system and method and computer program for processing measurement data

TOSHIBA KK7 citations74
US8041105B2Oct 18, 2011

Pattern evaluation method, computer-readable medium, and semiconductor device manufacturing method

TOSHIBA KK3 citations63
US7274820B2Sep 25, 2007

Pattern evaluation system, pattern evaluation method and program

TOSHIBA KK6 citations63
US7151855B2Dec 19, 2006

Pattern measurement method, manufacturing method of semiconductor device, pattern measurement apparatus, and program

TOSHIBA KK6 citations63
US7787687B2Aug 31, 2010

Pattern shape evaluation apparatus, pattern shape evaluation method, method of manufacturing semiconductor device, and program

TOSHIBA KK4 citations62
US8355560B2Jan 15, 2013

Pattern evaluation system, pattern evaluation method and semiconductor device manufacturing method

TOSHIBA KK0 citations52
US8019165B2Sep 13, 2011

Image processing apparatus, image processing method, defect detection method, semiconductor device manufacturing method, and program

TOSHIBA KK0 citations52
US8045807B2Oct 25, 2011

Pattern edge detecting method and pattern evaluating method

TOSHIBA KK0 citations42
US8036445B2Oct 11, 2011

Pattern matching method, program and semiconductor device manufacturing method

TOSHIBA KK0 citations42
US8019149B2Sep 13, 2011

Pattern shape evaluation method and pattern shape evaluation apparatus utilizing the same

TOSHIBA KK0 citations42

MITSUI TADASHI

9 patents

TDK CORP

6 patents

TDK ELECTRONICS CO LTD

3 patents

NAT INST FOR MATERIALS SCIENCE

2 patents

JAPAN SCIENCE & TECH AGENCY

2 patents

TOKYO ELECTRON LTD

1 patent

IBM

1 patent

ANDO ELECTRIC

1 patent

MIYANO YUMIKO

1 patent