Inventor

NISHIHARA KATSUNOBU

JP5 patents

⚠️ This page may combine multiple inventors who share the name “NISHIHARA KATSUNOBU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

UNIV OSAKA

2 patents

US7885387B2Feb 8, 2011

Extreme ultraviolet light and X-ray source target and manufacturing method thereof

UNIV OSAKA0 citations45

US7521702B2Apr 21, 2009

Extreme ultraviolet light source and extreme ultraviolet light source target

UNIV OSAKA0 citations43

WATARI TAKESHI

1 patent

US9953729B2Apr 24, 2018

Radiation generating apparatus and radiation generating method

WATARI TAKESHI18 citations79

GIGAHOTON INC

1 patent

US7928418B2Apr 19, 2011

Extreme ultra violet light source apparatus

GIGAHOTON INC7 citations75

GIGAPHOTON INC

1 patent

US8354657B2Jan 15, 2013

Extreme ultra violet light source apparatus

GIGAPHOTON INC0 citations48