Inventor

SPENGLER UWE

DE3 patents

⚠️ This page may combine multiple inventors who share the name “SPENGLER UWE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT GMBH

2 patents

US9217930B2Dec 22, 2015

Illumination system for a microlithographic projection exposure apparatus

ZEISS CARL SMT GMBH1 citations60

US9575414B2Feb 21, 2017

Illumination system for a microlithographic projection exposure apparatus

ZEISS CARL SMT GMBH0 citations50

WANGLER JOHANNES

1 patent

US8395756B2Mar 12, 2013

Illumination system for a microlithographic projection exposure apparatus

WANGLER JOHANNES2 citations58