Inventor
SAKURAI TOMOHIKO
JP4 patents
Patents
4 patentsUS11603459B2Mar 14, 2023
Resin composition and method of forming resist pattern
JSR CORP0 citations57
US11130856B2Sep 28, 2021
Resin composition and method of forming resist pattern
JSR CORP0 citations57
US10564546B2Feb 18, 2020
Resist pattern-forming method
JSR CORP1 citations51
US9541827B2Jan 10, 2017
Photosensitive composition, cured film and production process thereof, and electronic part
JSR CORP0 citations45