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Inventor
KANG WENBING
JP
3 patents
⚠️ This page may combine multiple inventors who share the name “KANG WENBING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AZ ELECTRONIC MATERIALS USA
2 patents
US7923200B2
Apr 12, 2011
Composition for coating over a photoresist pattern comprising a lactam
AZ ELECTRONIC MATERIALS USA
17 citations
82
US8039202B2
Oct 18, 2011
Positive-working photoimageable bottom antireflective coating
AZ ELECTRONIC MATERIALS USA
11 citations
81
KANG WENBING
1 patent
US8618002B2
Dec 31, 2013
Resist pattern formating method
KANG WENBING
0 citations
41