Inventor

CHANG DAVID T

US82 patents

⚠️ This page may combine multiple inventors who share the name “CHANG DAVID T”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHANG DAVID T

HRL LAB LLC

Quartz-based nanoresonators and method of fabricating same

Quartz-based nanoresonator

Method for fabricating a resonator

Integrated optical waveguide and electronic addressing of quantum defect centers

MEMS-based quartz hybrid filters and a method of making the same

Integrated quartz oscillator on an active electronic substrate

Method of fabricating an ultra thin quartz resonator component

Method for fabricating quartz-based nanoresonators

Method for large scale integration of quartz-based devices

Single crystal, tunneling and capacitive, three-axes sensor using eutectic bonding and a method of making same

Single crystal, dual wafer, tunneling sensor or switch with silicon on insulator substrate and a method of making same

Method of manufacturing a dual wafer tunneling gyroscope

Method for producing a disk resonator gyroscope

Low frequency quartz based MEMS resonators and method of fabricating the same

Method of fabricating an RF MEMS switch with spring-loaded latching mechanism

RF MEMS switch with spring-loaded latching mechanism

Cloverleaf microgyroscope with through-wafer interconnects and method of manufacturing a cloverleaf microgyroscope with through-wafer interconnects

Navigational grade resonant MicroElectroMechanical Systems (mems) accelerometer and method of operation

Continuous trajectory calculation for directional drilling

High stability angular sensor

High dynamic range gyroscope

Method and apparatus for the monolithic encapsulation of a micro-scale inertial navigation sensor suite

Phononic travelling wave gyroscope

Rounded and curved integrated tethers for quartz resonators

Micro-scale piezoelectric resonating magnetometer

Quartz resonator with plasma etched tethers for stress isolation from the mounting contacts

Resonator assembly comprising a silicon resonator and a quartz resonator

Doubly-clamped bean quartz micro-resonator

Device having integrated MEMS switches and filters

Method of fabricating a low frequency quartz resonator

Microelectromechanical tunneling gyroscope and an assembly for making a microelectromechanical tunneling gyroscope therefrom

FM demodulation system for quartz MEMS magnetometer

Quartz magnetometer having a quartz resonant plate with a broaden distal end for enhanced magnetic sensitivity

Piezoelectric magnetometer capable of sensing a magnetic field in multiple vectors

Dielectric high Q MEMS shell gyroscope structure

Single crystal, dual wafer, tunneling sensor or switch with silicon on insulator substrate and a method of making same

Dual-wafer tunneling gyroscope and an assembly for making same

Single crystal tunneling sensor or switch with silicon beam structure and a method of making same

High stability angular sensor

CHANG DAVID T

Supercapacitor cells and micro-supercapacitors

Quartz-based MEMS resonators and methods of fabricating same

Thermal stress resistant resonator, and a method for fabricating same

Large area integration of quartz resonators with electronics

Methods of making supercapacitor cells and micro-supercapacitors

Method of fabrication an ultra-thin quartz resonator

KUBENA RANDALL L

Quartz-based disk resonator gyro with ultra-thin conductive outer electrodes and method of making same

Method of manufacturing MEMS based quartz hybrid filters

BOEING CO

Disc resonator gyroscopes

GREENAIR INC

Diffuser for essential oils

REGAN DEAN C

Gate metallization methods for self-aligned sidewall gate GaN HEMT