Inventor

CHEAH LI KANG

SG3 patents

⚠️ This page may combine multiple inventors who share the name “CHEAH LI KANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NANOFILM TECHNOLOGIES INT

1 patent

US6923891B2Aug 2, 2005

Copper interconnects

NANOFILM TECHNOLOGIES INT14 citations76

NANOFILM TECHNOLOGIES INTERNAT PTE LTD

1 patent

US7871506B2Jan 18, 2011

Continuous ARC deposition apparatus and method with multiple available targets

NANOFILM TECHNOLOGIES INTERNAT PTE LTD2 citations53

AGENCY SCIENCE TECH & RES

1 patent

US10494295B2Dec 3, 2019

Anti-reflection coating

AGENCY SCIENCE TECH & RES1 citations46