Inventor
NIELSEN TODD C
US3 patents
Patents
3 patentsUS5969805AOct 19, 1999
Method and apparatus employing external light source for endpoint detection
MICRON TECHNOLOGY INC22 citations90
US6509960B2Jan 21, 2003
Method and apparatus employing external light source for endpoint detection
MICRON TECHNOLOGY INC21 citations88
US6429928B2Aug 6, 2002
Method and apparatus employing external light source for endpoint detection
MICRON TECHNOLOGY INC9 citations71