Inventor
VAN DE PASCH ENGELBERTUS ANTON
NL3 patents
Patents
3 patentsUS6853440B1Feb 8, 2005
Position correction in Y of mask object shift due to Z offset and non-perpendicular illumination
ASML NETHERLANDS BV20 citations90
US6747729B2Jun 8, 2004
Lithographic projection apparatus, device manufacturing method, device manufactured thereby and gas composition
ASML NETHERLANDS BV20 citations88
US6987557B2Jan 17, 2006
Enhanced lithographic displacement measurement system
ASML NETHERLANDS BV3 citations59